晶圓翹曲
量測系統
Wafer Warpage Laser Metrology System
規格
Laser Head : Keyence CL-P070
Drive Motor : Linear Motor
Recipe : User Define
Base : Ceramic Platen
Accuracy : +- 4 μ
Drive Motor : Linear Motor
Recipe : User Define
Base : Ceramic Platen
Accuracy : +- 4 μ
